The passivation of electrically active sites on the surface of crystalline silicon by fluorination-Reference-Cited by-同舟云学术

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The passivation of electrically active sites on the surface of crystalline silicon by fluorination

Published:1985-05 Issue:3 Volume:3 Page:887-891
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Weinberger B. R.,Deckman H. W.,Yablonovitch E.,Gmitter T.,Kobasz W.,Garoff S.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.573340

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