Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors-Reference-Cited by-同舟云学术

Possible applications of scanning frequency comb microscopy for carrier profiling in semiconductors

Published:2014-12-31 Issue:2 Volume:33 Page:02B109
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Hagmann Mark J.¹,Andrei Petru²,Pandey Shashank³,Nahata Ajay³

Affiliation:

1. NewPath Research L.L.C., 2880 S. Main Street, Suite 214, Salt Lake City, Utah 84115

2. Department of Electrical and Computer Engineering, Florida State University, 2525 Pottsdamer Street, Tallahassee, Florida 32310

3. Department of Electrical and Computer Engineering, University of Utah, 50 S. Central Campus Drive, Salt Lake City, Utah 84112

Funder

U.S. Department of Energy

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4905095

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