An XPS study of the oxidation of AlAs thin films grown by MBE
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Published:1982-03
Issue:3
Volume:20
Page:751-755
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
182 articles.
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