Characterization and operation of a mechanically actuated silicon microgripper-Reference-Cited by-同舟云学术

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Characterization and operation of a mechanically actuated silicon microgripper

Published:2006 Issue:6 Volume:24 Page:3239
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Blideran Marius M.,Fleischer Monika,Henschel Wolfgang,Kern Dieter P.,Sterr Jochen,Schock Klaus,Kleindiek Stephan,Langer Matthias G.,Löffler Karsten,Grauvogel Francois

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications;Journal of Microelectromechanical Systems;2013-12

3. Nanohandling of Biomaterials;Nanorobotics;2012-11-10

4. Fabrication of a novel SEM microgripper by electrochemical and FIB techniques;Journal of Micromechanics and Microengineering;2009-12-08

5. Manipulation of biological samples using micro and nano techniques;Integr. Biol.;2009

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