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Plasma etching of proton-exchanged lithium niobate

Published:2006-07 Issue:4 Volume:24 Page:1012-1015
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Hu H.,Milenin A. P.,Wehrspohn R. B.,Hermann H.,Sohler W.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.2207150

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