Effects of polymer residue on the pull-in of suspended graphene-Reference-Cited by-同舟云学术

Effects of polymer residue on the pull-in of suspended graphene

Published:2020-03 Issue:2 Volume:38 Page:023001
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Ng Jimmy¹,Jones Talmage²^ORCID,Martinez-Velis Isaac³,Wang Albert⁴,Hopkins Jonathan²^ORCID,Xie Ya-Hong¹^ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of California Los Angeles, 410 Westwood Plaza, 3111 Engineering V, Los Angeles, California 90095

2. Department of Mechanical and Aerospace Engineering, University of California Los Angeles, 420 Westwood Plaza, 48-121 Engineering IV, Los Angeles, California 90095

3. Department of Electrical and Computer Engineering, University of California Los Angeles, 420 Westwood Plaza, 56-125B Engineering IV, Los Angeles, California 90095

4. Department of Electrical and Computer Engineering, University of California Riverside, 900 University Avenue, Suite 343 Winston Chung Hall, Riverside, California 92521

Funder

National Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.5126439

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