Correlation of target properties and plasma parameters in DC magnetron sputtering with Langmuir probe measurements-Reference-Cited by-同舟云学术

Correlation of target properties and plasma parameters in DC magnetron sputtering with Langmuir probe measurements

Published:2017-11 Issue:6 Volume:35 Page:061308
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Raggl Stefan,Postler Johannes,Winkler Jörg¹,Strauss Georg²,Feist Christian³,Plankensteiner Arno,Eidenberger-Schober Michael,Scheier Paul⁴

Affiliation:

1. PLANSEE SE, Metallwerk-Plansee-Straße 71, 6600 Reutte, Austria

2. PhysTech Coating Technology GmbH, Knappenweg 34, 6600 Pflach, Austria

3. CENUMERICS, Haspingerstraße 16, 6020 Innsbruck, Austria

4. Institute for Ion Physics and Applied Physics, University of Innsbruck, Technikerstrasse 25, 6020 Innsbruck, Austria

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

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