Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas-Reference-Cited by-同舟云学术

Experiments and kinetic modeling of the ion energy distribution function at the substrate surface during magnetron sputtering of silver targets in radio frequency argon plasmas

Published:2019-03 Issue:2 Volume:37 Page:021301
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Garofano Vincent¹,Montpetit Florence¹,Glad Xavier¹,Gangwar Reetesh Kumar¹,Stafford Luc¹

Affiliation:

1. Département de physique, Université de Montréal, Montréal, Québec H3C 3J7, Canada

Funder

Natural Sciences and Engineering Research Council of Canada

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5054101

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4. Large-grained Ag thin films with low electrical resistivity produced by sputtering in Kr gas;Japanese Journal of Applied Physics;2020-03-30

5. Phase-Resolved Measurement of Atmospheric-Pressure Radio-Frequency Pulsed Discharges in Ar/CH4/CO2 Mixture;Plasma Chemistry and Plasma Processing;2020-03-14