Superconformal chemical vapor deposition of thin films in deep features-Reference-Cited by-同舟云学术

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Superconformal chemical vapor deposition of thin films in deep features

Published:2014-09 Issue:5 Volume:32 Page:051512
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Wang Wenjiao B.,Chang Noel N.,Codding Tracey A.,Girolami Gregory S.,Abelson John R.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4893930

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