Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films-Reference-Cited by-同舟云学术

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Hydrogen incorporation and release from nonevaporable getter coatings based on oxygen-free Pd/Ti thin films

Published:2019-09 Issue:5 Volume:37 Page:051601
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Matsumoto Masuaki¹,Okada Tomohiro¹,Miyazawa Tetsuya²,Mase Kazuhiko²³,Yamanaka Misao⁴,Hashimoto Ayako⁴⁵,Wilde Markus⁶,Fukutani Katsuyuki⁶⁷

Affiliation:

1. Tokyo Gakugei University, 4-1-1 Nukui-kita-machi, Koganei-shi, Tokyo 184-8501, Japan

2. School of High Energy Accelerator Science, SOKENDAI, 1-1 Oho, Tsukuba 305-0801, Japan

3. Institute of Materials Structure Science, KEK, 1-1 Oho, Tsukuba 305-0801, Japan

4. National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan

5. Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-2-1 Sengen, Tsukuba 305-0047, Japan

6. Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

7. Advanced Science Research Center, Japan Atomic Energy Agency (JAEA), Tokai, Ibaraki 319-1195, Japan

Funder

TIA-Kakehashi

Japan Society for the Promotion of Science

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5108983

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of nano-scaffold on improving gettering performance of Ti-Zr-V film and the influencing mechanism;Materials Today Communications;2024-06

2. Zero-length conflat fin-type nonevaporable getter pump deposited with oxygen-free palladium/titanium;Vacuum;2023-06

3. Microstructure and adsorption characteristics of Zr–Co–RE getter films deposited using krypton as sputtering gas;AIP Advances;2023-05-01

4. Development and characterization of an improved Ti-Zr-V thin-film getter with 3D porous nano-scaffolds;Vacuum;2023-03

5. Sorption properties of novel-fashioned low-cost hydrogen getters in a high-vacuum-multilayer insulation structure;Vacuum;2021-10

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