Transition metal nitride formed by simultaneous physisorption and thermal evaporation; TiN/Si(100)
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Published:1998-05
Issue:3
Volume:16
Page:1686-1691
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Ahn S.,Han J. Y.,Seo J. M.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics