Silicon nitride-capped silicon nanocrystals via a nonthermal dual-plasma synthesis approach
Author:
Affiliation:
1. Department of Mechanical Engineering, Michigan State University, 428 S. Shaw Lane, East Lansing, Michigan 48823
Funder
College of Engineering, Michigan State University
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5039352
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