Ion bombardment induced formation of self-organized wafer-scale GaInP nanopillar assemblies-Reference-Cited by-同舟云学术

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Ion bombardment induced formation of self-organized wafer-scale GaInP nanopillar assemblies

Published:2020-01 Issue:1 Volume:38 Page:012801
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Visser Dennis¹^ORCID,Jaramillo-Fernandez Juliana¹,Haddad Gabriel¹,Sotomayor Torres Clivia M.¹²³,Anand Srinivasan¹

Affiliation:

1. Department of Applied Physics, KTH Royal Institute of Technology, Electrum 229, SE-164 40 Kista, Sweden

2. Catalan Institute of Nanoscience and Nanotechnology (ICN2), CSIC and The Barcelona Institute of Science and Technology, Campus UAB, 08193 Bellaterra, Barcelona, Spain

3. ICREA, Pg. Lluis Companys 23, 08010, Barcelona, Spain

Funder

Linne center for advanced optics and photonics

Energimyndigheten

Vetenskapsrådet

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5127265

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. GaAs milling with neon focused ion beam: Comparison with gallium focused ion beam milling and subsurface damage analysis;Applied Surface Science;2021-02

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