Investigation of electrochemical etch differences in AlGaAs heterostructures using Cl2 ion beam assisted etching
-
Published:2015-03
Issue:2
Volume:33
Page:021304
-
ISSN:0734-2101
-
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
-
language:en
-
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Anglin Kevin,Goodhue William D.,Swint Reuel B.,Porter Jeanne
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics