Topography of epitaxial GaAs surfaces for growth
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Published:2009
Issue:3
Volume:27
Page:1072
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ISSN:1071-1023
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Lehman S. Y.,Roshko A.,Mirin R. P.,Bertness K. A.,Harvey T. E.,Cobry K. D.
Publisher
American Vacuum Society
Subject
Electrical and Electronic Engineering,Condensed Matter Physics