Metrology of electron-beam lithography systems using holographically produced reference samples
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Published:1991-11
Issue:6
Volume:9
Page:3606
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
35 articles.
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