Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists-Reference-Cited by-同舟云学术

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Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resists

Published:2018-11 Issue:6 Volume:36 Page:06JC02
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Narcross Hannah¹,Sharp Brandon L.¹,Ludovice Peter J.²,Tolbert Laren M.¹,Henderson Clifford L.²³

Affiliation:

1. Department of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, Georgia 30332

2. Department of Chemical and Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332

3. Department of Chemical and Biomolecular Engineering, University of South Florida, Tampa, Florida 33620

Funder

National Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5057442

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