Energy and momentum transport by sputtered and reflected streams in a glow discharge-Reference-Cited by-同舟云学术

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Energy and momentum transport by sputtered and reflected streams in a glow discharge

Published:1987-07 Issue:4 Volume:5 Page:2217-2221
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Gras‐Marti Alberto,Vallés‐Abarca José A.,Bensaoula Abdelhak

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.574960

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Model of the cathode region and gas temperature of a dc glow discharge at high current density;Journal of Physics D: Applied Physics;2000-02-18

2. Monte Carlo calculations of gas rarefaction in a magnetron sputtering discharge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1995-07

3. Material transport in high-pressure diode sputtering;Journal of Physics D: Applied Physics;1993-04-14

4. Transport processes in plasma assisted deposition of superconducting thin films;Vacuum;1990-01

5. Transport Phenomena in Plasma Processing;Plasma-Surface Interactions and Processing of Materials;1990

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