Fabrication of tapered graded-refractive-index micropillars using ion-implanted-photoresist as an etch mask
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Published:2014-03
Issue:2
Volume:32
Page:021305
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Ma Ming,Fred Schubert E.,Cho Jaehee,Evans Morgan,Bum Kim Gi,Sone Cheolsoo
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics