Evolution of tungsten film deposition induced by focused ion beam-Reference-Cited by-同舟云学术

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Evolution of tungsten film deposition induced by focused ion beam

Published:2002-07 Issue:4 Volume:20 Page:1408-1415
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Langfischer H.,Basnar B.,Hutter H.,Bertagnolli E.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1486230

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pattern generation method and prediction model of nanohelices fabricated by focused ion beam induced deposition;Precision Engineering;2022-09

2. The voltage–current characteristics of superconductors under magnetic field;The European Physical Journal B;2022-03

3. Determining instantaneous removal rates in metal chemical mechanical planarization;Japanese Journal of Applied Physics;2020-05-20

4. Comparison between Focused Electron/Ion Beam-Induced Deposition at Room Temperature and under Cryogenic Conditions;Micromachines;2019-11-21

5. Ultra-fast direct growth of metallic micro- and nano-structures by focused ion beam irradiation;Scientific Reports;2019-10-01

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