Investigation and optimization of reactive ion etching of Si3N4 and polyphthalaldehyde for two-step gray scale fabrication of diffractive optics-Reference-Cited by-同舟云学术

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Investigation and optimization of reactive ion etching of Si3N4 and polyphthalaldehyde for two-step gray scale fabrication of diffractive optics

Published:2019-11 Issue:6 Volume:37 Page:061608
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Aminzadeh Alaleh¹,Bose Manjith¹,Smith Dan²,Uddin Md Hemayet²,Peele Andrew G.¹³,van Riessen Grant¹²

Affiliation:

1. Department of Chemistry and Physics, La Trobe Institute of Molecular Science, La Trobe University, Melbourne, Victoria 3086, Australia

2. Melbourne Centre for Nanofabrication, Clayton, Victoria 3168, Australia

3. Australian Synchrotron, ANSTO, Clayton, Victoria 3168, Australia

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5121760

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1. Tip-Based Nanomachining on Thin Films: A Mini Review;Nanomanufacturing and Metrology;2021-09-21

2. Nanoscale manipulation of materials patterning through thermomechanical nanolithography using atomic force microscopy;Materials & Design;2021-04

3. Thermal scanning probe lithography—a review;Microsystems & Nanoengineering;2020-04-06

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