Beam profile measurement of volcano-structured double-gate Spindt-type field emitter arrays-Reference-Cited by-同舟云学术

Beam profile measurement of volcano-structured double-gate Spindt-type field emitter arrays

Published:2016-03 Issue:2 Volume:34 Page:02G108
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Nagao Masayoshi,Gotoh Yasuhito,Neo Yoichiro,Mimura Hidenori

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4944453

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimization of Sputtering Condition for TiN-Coated Si-FEA;2024 37th International Vacuum Nanoelectronics Conference (IVNC);2024-07-15

2. Improvement of Electron Emission Properties of Volcano-Structured Silicon Emitters by Titanium Nitride Coating;2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC);2023-07-10

3. The impact of Titanium nitride coating on emission characteristics in volcano-structured field emitter array;2023 30th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV);2023-06-25

4. Volcano-structured Double-gated Field Emitter Arrays; Emission Characteristics and Applications;2023 24th International Vacuum Electronics Conference (IVEC);2023-04-25

5. Vacuum Nanoelectronics Based on Semiconductor Field-Emission Structures: Current State and Development Prospects. Review;Semiconductors;2023-01