Dielectric properties of high-density-plasma fluorinated-silicate glass by doping nitrogen
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Published:2008-05
Issue:3
Volume:26
Page:481-484
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Wei B. J.,Cheng Y. L.,Wang Y. L.,Lu F. H.,Shih H. C.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics