Silicon chip field emission electron source fabricated by laser micromachining-Reference-Cited by-同舟云学术

Silicon chip field emission electron source fabricated by laser micromachining

Published:2020-01 Issue:1 Volume:38 Page:013202
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Langer Christoph¹²^ORCID,Bomke Vitali¹,Hausladen Matthias¹,Ławrowski Robert¹^ORCID,Prommesberger Christian¹^ORCID,Bachmann Michael²,Schreiner Rupert¹

Affiliation:

1. Faculty of General Sciences and Microsystems Technology, OTH Regensburg, D-93053 Regensburg, Germany

2. Ketek GmbH, D-81737 München, Germany

Funder

German Federal Ministry of Education and Research

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5134872

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