Electrical characterization of gate stack charge traps in floating body gate-all-around field-effect-transistors
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Published:2021-05
Issue:3
Volume:39
Page:032203
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ISSN:2166-2746
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Container-title:Journal of Vacuum Science & Technology B
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language:en
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Short-container-title:Journal of Vacuum Science & Technology B
Author:
Nguyen Manh-Cuong1,
Nguyen An Hoang-Thuy1,
Yim Jiyong1,
Nguyen Anh-Duy1,
Kim Mingyu1,
Kim Jeonghan1,
Beak Jongyeon1,
Choi Rino1
Affiliation:
1. 3D Convergence Center and Department of Materials Science and Engineering, Inha University, Incheon 22212, South Korea
Funder
Ministry of Trade, Industry and Energy
National Research Foundation of Korea
Korea Institute for Advancement of Technology
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials