Author:
Yoshimura Nagamitsu,Hirano Haruo,Norioka Setsuo,Etoh Terukazu
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
6 articles.
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1. Cascade diffusion pump systems for electron microscopes;A Review: Ultrahigh-Vacuum Technology for Electron Microscopes;2020
2. Development of the Evacuation Systems for JEMs;Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes;2013-07-31
3. Advantages of Slow High-Vacuum Pumping for Suppressing Excessive Gas Load in Dynamic Evacuation Systems;Journal of the Vacuum Society of Japan;2009
4. Clean ultrahigh vacuum system with single‐structure diffusion pumps;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-09
5. Practical advantages of a cascade diffusion pump system of a scanning electron microscope;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1991-07