Characterization of particle generated during plasma-enhanced chemical vapor deposition on amorphous carbon layer using particle beam mass spectrometer

Author:

Kim Dongbin1,Kim TaeWan2,Park Sang Hyun3,Lim Sung Kyu3,Lee Hyo-Chang2,Kim Taesung4,Kang Sang-Woo5

Affiliation:

1. Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea and School of Mechanical Engineering, Sungkyunkwan University, Suwon, Gyeonggi 16419, South Korea

2. Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea

3. National Nanofab Center, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea

4. School of Mechanical Engineering, Sungkyunkwan University, Suwon, Gyeonggi 16419, South Korea

5. Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea and Department of Advanced Device Technology, University of Science and Technology, Daejeon 34113, South Korea

Funder

Ministry of Trade, Industry, and Energy

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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