Influence of deposition conditions on the thermal stability of ZnO:Al films grown by rf magnetron sputtering-Reference-Cited by-同舟云学术

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Influence of deposition conditions on the thermal stability of ZnO:Al films grown by rf magnetron sputtering

Published:2001-01 Issue:1 Volume:19 Page:171-174
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Haug F.-J.,Geller Zs.,Zogg H.,Tiwari A. N.,Vignali C.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1329121

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