High-yield fabrication method for high-frequency graphene devices using titanium sacrificial layers-Reference-Cited by-同舟云学术

High-yield fabrication method for high-frequency graphene devices using titanium sacrificial layers

Published:2019-07 Issue:4 Volume:37 Page:041801
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Theofanopoulos Panagiotis C.¹^ORCID,Ageno Scott²,Guo Yuqi³,Kale Suneet⁴,Wang Qing Hua³,Trichopoulos Georgios C.¹

Affiliation:

1. School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, Arizona 85287

2. NanoFab, Arizona State University, Tempe, Arizona 85287

3. Materials Science and Engineering, School for Engineering of Matter, Transport and Energy, Arizona State University, Tempe, Arizona 85287

4. School of Molecular Sciences, Arizona State University, Tempe, Arizona 85287

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5098324

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