Nanometer-scale Si selective epitaxial growth on Au-adsorbed Si(111) surface windows in ultrathin oxide films
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Published:2000
Issue:5
Volume:18
Page:2344
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Shibata Motoshi,Nitta Yoshiki,Fujita Ken,Ichikawa Masakazu
Publisher
American Vacuum Society
Subject
General Engineering