Author:
van den Brom A. J.,van Veen A. H. V.,Weeda W. M.,Berglund G. Z. M.,Wieland M.,Kruit P.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics
Cited by
6 articles.
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1. Cathodes for Electron Microscopy and Lithography;Modern Developments in Vacuum Electron Sources;2020
2. Electron optics of multi-beam scanning electron microscope;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2011-07
3. Multibeam scanning electron microscope: Experimental results;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2010-11
4. Design of a multiple-electron-beam imaging technique for surface inspection;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009
5. MAPPER: high throughput maskless lithography;SPIE Proceedings;2008-03-14