Obtaining pressures in the 10−5 Pa range with oil‐sealed rotary vacuum pumps
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Published:1982-09
Issue:3
Volume:21
Page:886-890
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
6 articles.
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1. Mechanical Pumps;A Users Guide to Vacuum Technology;2023-11-20
2. Pump Fluids and Lubricants;A Users Guide to Vacuum Technology;2023-11-20
3. References;Vacuum Technology;1990
4. Performance characteristics of displacement‐type vacuum pumps;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1986-05
5. A new energy-efficient approach to high vacuum pumping;Vacuum;1984-06