Study of multilayer systems in electron beam lithography-Reference-Cited by-同舟云学术

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Study of multilayer systems in electron beam lithography

Published:2013-11 Issue:6 Volume:31 Page:06F407
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Peters Robert,Fito Taras,Gutierrez-Rivera Luis,Dew Steven,Stepanova Maria

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4827813

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of plasmonic Au nanostructures on dielectric supports using 10 keV electron beam lithography and tests for SERS biodetection;Journal of Vacuum Science & Technology B;2023-02-01

2. Surface-enhanced Raman spectroscopy detection of protein-ligand binding using D-glucose and glucose binding protein on nanostructured plasmonic substrates;AIMS Materials Science;2017

3. A third-order mode high frequency biosensor with atomic resolution;Biosensors and Bioelectronics;2015-09

4. Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates;Journal of Visualized Experiments;2015-03-20

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