Real-time temperature monitoring using a noncontact thermocouple for the next-generation sputtering system-Reference-Cited by-同舟云学术

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Real-time temperature monitoring using a noncontact thermocouple for the next-generation sputtering system

Published:1996-01 Issue:1 Volume:14 Page:494
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:
Short-container-title:J. Vac. Sci. Technol. B

Author:

Hosokawa Akihiro

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of on-line temperature monitoring system for hull welding based on Xgboost-PSO;2019 14th IEEE International Conference on Electronic Measurement & Instruments (ICEMI);2019-11

2. The energy balance at substrate surfaces during plasma processing;Vacuum;2001-08

3. Rapid cooling dual slot load locks for liquid crystal display;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001-07

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