Three-dimensional micro- and nanostructuring by combination of nanoimprint and x-ray lithography
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High-Definition X-Ray Imaging of Small Gecko Skin Surface Protuberances for Digitization and 3D Printing;Advanced Materials Interfaces;2018-05-02
2. Metal Structures as Advanced Materials in Nanotechnology;Handbook of Nanomaterials Properties;2014
3. X-ray Lithography;Nano-Lithography;2013-03-07
4. Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-11
5. Polymers in conventional and alternative lithography for the fabrication of nanostructures;European Polymer Journal;2011-11
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