Confocal sputtering of conformal α-β phase W films on etched Al features-Reference-Cited by-同舟云学术

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Confocal sputtering of conformal α-β phase W films on etched Al features

Published:2014-12-23 Issue:1 Volume:33 Page:011203
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Kreikebaum John Mark¹,Cabrera Blas¹,Yen Jeffrey J.¹,Brink Paul L.²,Cherry Matt²,Tomada Astrid²,Young Betty A.³

Affiliation:

1. Department of Physics, Stanford University, 382 Via Pueblo, Stanford, California 94305

2. SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, California 94025

3. Department of Physics, Santa Clara University, 500 El Camino Real, Santa Clara, California 95053

Funder

U.S. Department of Energy

National Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4904422

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Diamond and SiC Detectors for Rare Event Searches;Journal of Low Temperature Physics;2024-06-21

2. Quasiparticle Transport in Thick Aluminum Films Coupled to Tungsten Transition Edge Sensors;Journal of Low Temperature Physics;2015-12-29

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