Summary Abstract: Ion‐assisted optical thin film deposition
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.574943
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Deposition of SiO2 and Ta2O5 films by electron-beam-excited plasma ion plating;Thin Solid Films;1996-08
2. Ion-beam-assisted deposition as a method for production of effective optical coatings;Surface and Coatings Technology;1995-05
3. Optical properties of ion-assisted deposited SiO thin films;Thin Solid Films;1994-04
4. Unbalanced Magnetron Sputtering;Physics of Thin Films;1994
5. Deposition of amorphous BaTiO3optical films at low temperature;Applied Physics Letters;1993-08-02
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