Local oxidation of metal and metal nitride films-Reference-Cited by-同舟云学术

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Local oxidation of metal and metal nitride films

Published:2004-07 Issue:4 Volume:22 Page:1879-1884
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Farkas N.,Tokash J. C.,Zhang G.,Evans E. A.,Ramsier R. D.,Dagata J. A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1723269

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