Maskless selected area processing
Author:
Publisher
American Vacuum Society
Subject
General Engineering
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Surface and Interface Analysis;Surfaces and Interfaces of Electronic Materials;2012-12-28
2. TEM-Based Metrology for HfO2Layers and Nanotubes Formed in Anodic Aluminum Oxide Nanopore Structures;Small;2008-08
3. Direct epitaxial growth of thin-film structures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11
4. Manufacturing of three-dimensional micro-parts by UV laser induced polymerization;Journal of Micromechanics and Microengineering;1996-06-01
5. Selectivity variations of electron beam patterned silicon dioxide films*;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1994-07
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