Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes-Reference-Cited by-同舟云学术

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Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes

Published:2004 Issue:2 Volume:22 Page:647
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Goldfarb Dario L.,Mahorowala Arpan P.,Gallatin Gregg M.,Petrillo Karen E.,Temple Karen,Angelopoulos Marie,Rasgon Stacy,Sawin Herbert H.,Allen Scott D.,Lawson Margaret C.,Kwong Ranee W.

Publisher

American Vacuum Society

Subject

General Engineering

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