Process control of high volume pseudomorphic high electron mobility transistor and metal–semiconductor field effect transistor molecular beam epitaxy production using temperature-dependent photoluminescence
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Published:2000
Issue:3
Volume:18
Page:1663
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering