Effect of duty cycle on the thermochromic properties of VO2 thin-film fabricated by high power impulse magnetron sputtering

Author:

Juan Pi-Chun12,Lin Kuei-Chih3,Lin Cheng-Li4,Lin Wei-Fan1

Affiliation:

1. Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei 243, Taiwan

2. Department of Electronic Engineering and Institute of Electro-Optical Engineering, Chang Gung University, Taoyuan 333, Taiwan

3. Department of Electronic Engineering, Ming Chuan University, Taoyuan 333, Taiwan

4. Department of Electronic Engineering, Feng Chia University, Taichung 407, Taiwan

Funder

Ministry of Science and Technology, Taiwan

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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