Scanning ion beam techniques for the examination of microelectronic devices
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Published:1988-05
Issue:3
Volume:6
Page:1026
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
19 articles.
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1. Quantitative Model of FIB Deposition;Advanced Engineering Materials;2007-08
2. FIB/SEM Characterization of Carbon-based Fibers;Scanning;2007
3. Using the FIB to characterize nanoparticle materials;Journal of Microscopy;2004-06
4. Characterization;Engineering Ceramics;2001
5. Mathematical modeling of focused ion beam microfabrication;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-01