Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer deposition-Reference-Cited by-同舟云学术

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Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer deposition

Published:2019-03 Issue:2 Volume:37 Page:020904
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Bickford Justin R.¹,Sønsteby Henrik Hovde²,Strnad Nicholas A.³,Zavalij Peter Y.⁴,Hoffman Robert C.¹

Affiliation:

1. U.S. Army Research Laboratory, 2800 Powder Mill Rd., Adelphi, Maryland 20783

2. Department of Chemistry, University of Oslo, Sem Sælands vei 26, 0371 Oslo, Norway

3. General Technical Services, LLC, 1451 Route 34 South—Suite 301, Wall Township, New Jersey 07727

4. Department of Chemistry and Biochemistry, University of Maryland, College Park, Maryland 20742

Funder

Research council of Norway

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5063925

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Extending atomic layer deposition for use in next-generation piezoMEMS: Review and perspective;Journal of Vacuum Science & Technology A;2023-07-11

2. Effect of Ni doping on the electro-optic property in K(Ta_0.6Nb_0.4)O₃ films;Japanese Journal of Applied Physics;2022-07-22

3. Optimizing the growth of K(Ta<sub>0.6</sub>Nb<sub>0.4</sub>)O<sub>3</sub> films using pulsed laser deposition and their electro-optic property;Journal of the Ceramic Society of Japan;2022-07-01

4. Avoiding water reservoir effects in ALD of functional complex alkali oxides by using O3 as the oxygen source;Dalton Transactions;2022

5. Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films;ACS Applied Materials & Interfaces;2021-11-26

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