Author:
Berry Lee A.,Gorbatkin S. M.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Foundations of physical vapor deposition with plasma assistance;Plasma Sources Science and Technology;2022-08-01
2. Physics and technology of magnetron sputtering discharges;Plasma Sources Science and Technology;2020-11-01
3. Review of the Cutoff Problem;Compact Plasma and Focused Ion Beams;2013-11-20
4. Introduction;Compact Plasma and Focused Ion Beams;2013-11-20
5. Vacuum Plasma Sources;Industrial Plasma Engineering;2001-08-25