Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering-Reference-Cited by-同舟云学术

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Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering

Published:2013-11 Issue:6 Volume:31 Page:061516
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Mei A. B.,Howe B. M.,Zhang C.,Sardela M.,Eckstein J. N.,Hultman L.,Rockett A.,Petrov I.,Greene J. E.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4825349

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