Theoretical study of the adsorption of Lewis acids on MoS2 in relation to atomic layer deposition of Al2O3
Author:
Affiliation:
1. Electronics Science and Technology Division, US Naval Research Laboratory, Washington, DC 20375
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/6.0000467
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