Preparation and characterization of amorphous SiC:H thin films-Reference-Cited by-同舟云学术

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Preparation and characterization of amorphous SiC:H thin films

Published:1991-05 Issue:3 Volume:9 Page:450-455
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Delplancke M. P.,Powers J. M.,Vandentop G. J.,Salmeron M.,Somorjai G. A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.577431

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