Toroidal plasma enhanced CVD of diamond films-Reference-Cited by-同舟云学术

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Toroidal plasma enhanced CVD of diamond films

Published:2014-09 Issue:5 Volume:32 Page:050605
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Zvanya John,Holber William,Cullen Christopher,Morris Thomas,Basnett Andrew,Basnett Robert,Hettinger Jeffrey,Krchnavek Robert R.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4893416

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD;Coatings;2020-09-30

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