Heating mechanisms of magnetized capacitively coupled argon plasmas excited by tailored voltage waveforms-Reference-Cited by-同舟云学术

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Heating mechanisms of magnetized capacitively coupled argon plasmas excited by tailored voltage waveforms

Published:2017-11 Issue:6 Volume:35 Page:061311
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Yang Shali¹,Innocenti Maria Elena²,Zhang Ya³,Yi Lin¹,Jiang Wei¹

Affiliation:

1. School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

2. Centre for Mathematical Plasma-Astrophysics, Department of Mathematics, University of Leuven, Leuven 3001, Belgium

3. School of Science, Wuhan University of Technology, Wuhan 430070, China

Funder

Fonds Wetenschappelijk Onderzoek Vlaanderen

National Natural Science Foundation of China

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4990137

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3. Influence of magnetic field gradient on the capacitive argon discharge at 8 MHz and 40 MHz;Plasma Sources Science and Technology;2023-05-01

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